THE ETCHING OF SILICON CARBIDE - ScienceDirect
Mat. Res. Bull. Vol. 4, pp. S 199 - S 210, 1969. Printed in the United States. Pergamon P r e s s , Inc. THE ETCHING OF SILICON CARBIDE V. J. Jennings Lanchester College of Technology Coventry, Warwickshire England (Received October 22, 1968) ABSTRACT Developments in methods for etching silicon carbide are reviewed.